Integrated Microsystems

Course overview

The aim of this course is to foster and promote knowledge of microelectronic mechanical systems (MEMs) and skills/competencies in the design and performance analysis of typical microelectronic mechanical systems. It also discusses some basic principles, processing technology and design methodology of these systems.

What you will learn

• Master basic theory of MEMs technology;
• Identify and summarize pros and cons in existing MEMs technology
• Experiment basic processing techniques and design methodology of MEMs
• Evaluate and assess the performance of MEMs

Meet your instructor

Course content

• Session 1: Introduction of MEMS
• Session 2: Basic principles and common methods of MEMS design
• Session 3: Microsystem Design Process
• Session 4: Microsystem Design Methods
• Session 5: Microsystem Modular Design
• Session 6: Microsystem Integrated Design
• Session 7: Key Technologies of Microsystem Design
• Session 8: manufacturing process of a typical MEMS system
• Session 9: Lithography and Etching Technology
• Session 10: MEMs sensors
• Session 11: Calibration and Self-Calibration of Smart Sensors
• Session 12: Typical Microsystem - Lab on a Chip
• Session 13: Industry applications.

Teaching methodology

Lectures, independent research, project-based learning

Assessment

• Lab assignment (40%) Will include lab assignment and open-ended theoretical questions.
• Final written exam (60%) Will include project based essay and open-ended theoretical questions.