IC Technology and Progress | MSc in Electronics and Technology

Course overview

The aim of this course is to foster and promote knowledge of semiconductor or microelectronic fabrication. The course covers the covers the entire basic unit processes used to fabricate integrated circuits and other devices.

What you will learn

Master the basic principles, methods
Design key microelectronics processes
Experiment the main process equipment and testing instruments
Arrange the manufacturing process of typical integrated circuit chips

Meet your instructor

Tiejun Zhou

Course content

Section 1: introduction of integrated circuit and nanotechnology
Section 2: introduction of semiconductors
Section 3: fabrication of Si wafers
Section 4: chemical mechanical polishing
Section 5: oxidation and doping
Section 6: introduction of vacuum technology
Section 7: film deposition by chemical means
Section 8: film deposition by physical means
Section 9: etching by chemical and physical means
Section 10: lithography
Section 11: ion implantation gettering
Section 12: Chip Package
Section 13: Chip test

Teaching methodology

Lecture, teaching and practice in clean room

Assessment

Midterm Presentation (40%) Will include an introduction and summary of topics relevant to this course
Final course paper (60%) Will include combination of numerical exercises and open-ended theoretical questions.